Deep ulatraviolet laser generation device and light source device

A deep ultraviolet laser generation device comprising:

• a first laser source of a thulium-doped laser source or a thulium-doped fiber source, the first laser source emitting light at a first wavelength, wherein the first wavelength is a wavelength between 1.87 μm and 2.1 μm;
• a second laser source of a semiconductor laser source, an erbium-doped fiber source, or an erbium/ytterbium-doped fiber source, the second laser source emitting light at a second wavelength, wherein the second wavelength is a wavelength between 1.53 μm and 1.57 μm;
• a first nonlinear wavelength conversion element for generating near-infrared light at a wavelength between 841 nm and 899 nm from the light at the first wavelength and the light at the second wavelength through a sum-frequency mixing process;
• a second nonlinear wavelength conversion element for generating blue light at a wavelength between 420 nm and 450 nm, from the near-infrared light through a second harmonic generation process;
• and
• a third nonlinear wavelength conversion element for generating deep ultraviolet light at a wavelength between 210 nm and 225 nm from the blue light through a second harmonic generation process.