Cooling device for electronic components using liquid coolant
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorXavier BAILLIN
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Abstract
Device used for cooling a component, comprising a support to receive a component to be cooled, the support comprising a fluid network in which a liquid will circulate, the network comprising a first cavity, a second cavity, and a first channel connecting the first cavity to the second cavity, a first deformable membrane and a second deformable membrane forming a mobile wall of the first cavity and a mobile wall of the second cavity respectively, the device further comprising means of actuation of the first membrane and of the second membrane and a thermal conducting element close to the channel or in contact with the channel, the means of actuation comprising a fixed electrode located on one or several protuberances of the support (FIG. 6).
Claims18
Device for cooling at least one component comprising:
- a support that will receive on a first face at least one component to be cooled, the support comprising a fluid network inside which a liquid will circulate, the network comprising a first cavity, a second cavity, and at least one first channel connecting the first cavity to the second cavity, a first deformable membrane and a second deformable membrane forming a mobile wall of the first cavity and a mobile wall of the second cavity respectively,
- an actuating device for actuating the first membrane and the second membrane, configured to enable deformation of the first and/or the second membrane so as to vary the volume of the first cavity and/or the second cavity and to enable displacement of the liquid in the channel, wherein the actuating device comprises:
- at least one first electrode located on the first membrane,
- at least one second electrode located on the second membrane.
- at least one fixed electrode located on the support and facing the first electrode in the first cavity or facing the second electrode in the second cavity or facing both the first electrode and the second electrode,
- the fixed electrode being located on one or several protuberances of the support said protuberances facing the first electrode or the second electrode or both the second and the first electrode.
Dependencies are inferred from the claim text.