Condenser microphone and manufacturing method thereof
AssigneeNational Tsing Hua University
InventorsSun-Zen Chen, Henry J. H. Chen, Jen-Yi Chen, Kuan-Hsun Chiu, Kuang-Chien Hsieh
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Abstract
A condenser microphone comprises a substrate, a vibratile diaphragm and a back plate. The substrate has an opening. The diaphragm is disposed corresponding to the substrate and covers the opening, and has a plurality of protrusions. The back plate is coupled to the diaphragm and has a plurality of through holes, at least some of which are corresponding to the protrusions respectively. An interval is formed between the diaphragm and the back plate, and when the diaphragm vibrates, the protrusions move into or further near the through holes.
Claims4
A manufacturing method of a condenser microphone, comprising steps of:
- providing a substrate;
- forming a diaphragm having a plurality of protrusions on the substrate;
- forming a sacrifice layer on the diaphragm and covering the protrusions;
- disposing a back plate covering the sacrifice layer and partially coupled to the diaphragm;
- forming a plurality of through holes in the back plate, wherein at least some of the through holes are corresponding to the protrusions respectively;
- and
- removing the sacrifice layer.
Dependencies are inferred from the claim text.