Microphone and method of manufacturing the same

A method of manufacturing a microphone, comprising:

• preparing a substrate and forming a first sub-vibration membrane over the substrate;
• forming a first metal pattern layer on the first sub-vibration membrane;
• preparing a carrier substrate and forming a fixed electrode, having a plurality of air inlets over the carrier substrate;
• forming a sacrificial layer over the fixed electrode;
• forming a second sub-vibration membrane having a plurality of slots over the sacrificial layer;
• forming a second metal pattern layer on the second sub-vibration membrane;
• forming a connection layer by bonding the first metal pattern layer to the second metal pattern layer;
• removing the carrier substrate and forming a penetration aperture through which part of the first sub-vibration membrane is exposed by etching a rear of the substrate and the oxide layer;
• and
• removing part of the sacrificial layer,
• wherein the first sub-vibration membrane is flexible and the second sub-vibration membrane is rigid.