Microphone and method of manufacturing the same

A method of manufacturing a microphone, comprising:

• preparing a substrate and forming a first sub-vibration membrane having a plurality of first slots disposed over the substrate;
• forming a first sacrificial layer through which a central portion and edge of the first sub-vibration membrane are exposed over the first sub-vibration membrane;
• forming a second sub-vibration membrane, having a connection unit and a plurality of second slots, disposed over the first sub-vibration membrane and the first sacrificial layer;
• forming a second sacrificial layer over the second sub-vibration membrane;
• forming a fixed electrode, having a plurality of air inlets, disposed over the second sacrificial layer;
• etching a penetration aperture through which a portion of the first sub-vibration membrane is exposed by etching a rear of the substrate;
• and
• removing the first sacrificial layer and removing a portion of the second sacrificial layer,
• wherein the first sub-vibration membrane has flexibility, and the second sub-vibration membrane has rigidity.