Microphone and method of manufacturing the same
AssigneeHyundai Motor Company
InventorsIlseon Yoo, Hyunsoo Kim
Life of this patent
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Abstract
A microphone includes a substrate including a penetration hole; a vibration membrane disposed over the substrate and covering the penetration hole; a fixed electrode disposed over the vibration membrane and spaced apart from the vibration membrane; a fixed plate disposed over the fixed electrode; and a plurality of air inlets disposed in the fixed electrode and the fixed plate. The vibration membrane includes a plurality of slots positioned over the penetration hole, and an entire area of the plurality of slots is approximately 8% to approximately 19% of an entire area of the vibration membrane.
Claims20
A microphone, comprising:
- a substrate including a penetration hole;
- a vibration membrane disposed over the substrate and covering the penetration hole;
- a fixed electrode disposed over the vibration membrane and spaced apart from the vibration membrane;
- a fixed plate disposed over the fixed electrode;
- and
- a plurality of air inlets disposed in the fixed electrode and the fixed plate, wherein
- the vibration membrane includes a plurality of slots positioned over the penetration hole, and
- an entire area of the plurality of slots is approximately 8% to approximately 19% of an entire area of the vibration membrane.
A method of manufacturing a microphone, comprising:
- providing a substrate;
- forming a vibration membrane including a plurality of slots over the substrate;
- forming a sacrificial layer over the vibration membrane;
- forming a fixed electrode over the sacrificial layer;
- forming a fixed plate over the fixed electrode;
- forming a plurality of air inlets in the fixed electrode and the fixed plate;
- forming an air layer between the fixed electrode and the vibration membrane by removing part of the sacrificial layer;
- and
- forming a penetration hole in the substrate, through which a part of the vibration membrane is exposed, by etching a rear of the substrate,
- wherein an entire area of the plurality of slots is approximately 8% to approximately 19% of an entire area of the vibration membrane.
Dependencies are inferred from the claim text.