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US 2016/0111719 A1Published application
Method for manufacturing a plurality of nanowires
AssigneeInfineon Technologies AG
InventorsMarko Lemke, Stefan Tegen, Uwe Rudolph
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Abstract
A method for manufacturing a plurality of nanowires, the method including: providing a carrier comprising an exposed surface of a material to be processed and applying a plasma treatment on the exposed surface of the material to be processed to thereby form a plurality of nanowires from the material to be processed during the plasma treatment.
Claims20
A nanowire array comprising:
- a carrier comprising silicon;
- a diffusion barrier layer disposed over the carrier, the diffusion barrier layer comprising a nitride;
- a plurality of nanowires disposed over the diffusion barrier layer, the nanowires of the plurality of nanowires comprising silicon.
A nanostructure array comprising:
- a wafer;
- a diffusion barrier layer disposed over the wafer, the diffusion barrier layer comprising an electrically conductive nitride;
- a plurality of nanostructures disposed over the diffusion barrier layer.
A battery comprising:
- a carrier;
- a diffusion barrier layer disposed over the carrier, wherein the diffusion barrier layer is configured to prevent diffusion of lithium-ions into the carrier;
- a plurality of nanowires disposed over the diffusion barrier layer,
- a layer stack disposed over the plurality of nanowires, wherein the layer stack comprises at least one electrolyte layer, at least one cathode layer, and at least one cathode current collector layer, wherein the plurality of nanowires is at least part of an anode of the battery.
1 more element
Dependencies are inferred from the claim text.