Organic layer deposition apparatus, method of manufacturing organic light emitting display device using the apparatus, and organic light emitting display device manufactured using the method

An organic layer deposition apparatus comprising:

• a conveyer unit comprising a transfer unit for fixing a substrate and configured to move along with the substrate, a first conveyer unit for moving in a first direction the transfer unit on which the substrate is fixed, and a second conveyer unit for moving in a direction opposite to the first direction the transfer unit from which the substrate is separated after deposition has been completed;
• and
• a deposition unit comprising a chamber maintained in a vacuum state and at least one organic layer deposition assembly for depositing an organic layer on the substrate fixed on the transfer unit,
• the transfer unit comprises:
• a carrier comprising a contactless power supply (CPS) module;
• and
• an electrostatic chuck fixedly coupled to the carrier to fix the substrate,
• the transfer unit is configured to circulate between the first conveyer unit and the second conveyer unit, and
• the substrate fixed on the transfer unit is configured to be spaced apart from the organic layer deposition assembly by a set distance while being transferred by the first conveyer unit.