Back to results
US 2016/0111681 A1Published application
Mask assembly, apparatus for manufacturing display apparatus, and method of manufacturing display apparatus
AssigneeSamsung Display Co., Ltd.
InventorsJaesik Kim, Wooyong Sung, Duckjung Lee
Life of this patent
Estimating the term…
Abstract
Provided are a mask assembly, an apparatus for manufacturing a display apparatus, and a method of manufacturing the display apparatus. The mask assembly includes a mask comprising an opening having a pattern; and a self-assembled monolayer (SAM) that is coated on at least a portion of the mask.
Claims20
A mask assembly, comprising:
- a mask comprising an opening;
- and
- a self-assembled monolayer (SAM) coated on at least a portion of the mask.
An apparatus for manufacturing a display apparatus, the apparatus comprising:
- a chamber;
- a deposition source arranged within the chamber to accommodate and emit a deposition material;
- a mask separated from the deposition source and including an opening to form a pattern on a substrate,
- wherein a self-assembled monolayer (SAM) is coated on at least a portion of the mask.
1 more element
A method of manufacturing a display apparatus, the method comprising:
- providing a chamber including a deposition source that accommodates a deposition material within;
- inserting a substrate and a mask into the chamber, the mask being interposed between the deposition source and the substrate, the mask including an opening;
- aligning the substrate and the mask;
- and
- depositing the deposition material onto the substrate via the opening in the mask by heating the deposition source,
- wherein a self-assembled monolayer (SAM) is coated on at least a portion of the mask.
3 more elements
Dependencies are inferred from the claim text.