Optoelectronic device and method for manufacturing same
AssigneesAledia, Commissariat A L'energie Atomique Et Aux Energies
InventorsNathalie DECHOUX, Benoît AMSTATT, Phillipe GILET
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Abstract
An optoelectronic device comprises a substrate; pads on a surface of the substrate; semiconductor elements, each element resting on a pad; a portion covering at least the lateral sides of each pad, the portion preventing the growth of the semiconductor elements on the lateral sides; and a dielectric region extending in the substrate from the surface and connecting, for each pair of pads, one of the pads in the pair to the other pad in the pair. A method of manufacturing an optoelectronic device is also disclosed.
Claims12
An optoelectronic device comprising:
- a substrate;
- pads on a surface of the substrate;
- semiconductor elements, each element resting on a pad;
- a portion covering at least the lateral sides of each pad, said portion preventing growth of the semiconductor elements on the lateral sides;
- and
- a dielectric region extending in the substrate from said surface and connecting, for each pair of pads, one of the pads in the pair of pads to the other pad in the pair of pads.
A method of manufacturing an optoelectronic device comprising the successive steps of:
- providing a substrate;
- forming pads on a surface of the substrate;
- forming a portion covering at least the lateral sides of each pad and forming a dielectric region extending in the substrate from said surface and connecting, for each pair of pads, one of the pads in the pair of pads to the other pad in the pair of pads;
- and
- forming semiconductor elements, each element resting on a pad, said portion comprising a material preventing growth of the semiconductor elements on the lateral sides.
Dependencies are inferred from the claim text.