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US 2016/0111576 A1Published application
Cost-efficient high power pecvd deposition for solar cells
AssigneeInternational Business Machines Corporation
InventorsTZE-CHIANG CHEN, AUGUSTIN J. HONG, JEEHWAN KIM, DEVENDRA K. SADANA
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Abstract
A method for forming a photovoltaic device includes providing a substrate. A layer is deposited to form one or more layers of a photovoltaic stack on the substrate. The depositing of the amorphous layer includes performing a high power flash deposition for depositing a first portion of the layer. A low power deposition is performed for depositing a second portion of the layer.
Claims16
A photovoltaic device, comprising:
- a substrate;
- and
- at least one layer including a buffer layer or a p-type layer of a photovoltaic stack on the substrate, the at least one layer including a first portion of the layer and a second portion of the layer, the first and second portions of the layer including different crystallinity levels, the different crystallinity levels being provided adjacent to other layers such that use of the different crystallinity levels better transitions band gap energies between layers.
Dependencies are inferred from the claim text.