Back contact solar cell and fabrication method thereof

A method of making a back contact solar cell, the method comprising:

• forming an oxide layer on a rear surface of a semiconductor substrate;
• forming a first conductive type semiconductor region by doping a first dopant material of a first conductive type;
• forming a second conductive type semiconductor region by doping a second dopant material of a second conductive type;
• patterning the oxide layer on the rear surface of the semiconductor substrate to locally remove the oxide layer on the rear surface at a first location to form a first exposed portion of the semiconductor substrate to form a first contact between the first conductive type semiconductor region and a first electrode, and at a second location to form a second exposed portion of the semiconductor substrate to form a second contact between the second conductive type semiconductor region and a second electrode;
• and
• forming the first electrode at the first exposed portion and the second electrode at the second exposed portion.