Method for manufacturing semiconductor device and semiconductor device
AssigneeUnisantis Electronics Singapore Pte. Ltd.
InventorsFujio MASUOKA, Hiroki NAKAMURA
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AssigneeUnisantis Electronics Singapore Pte. Ltd.
InventorsFujio MASUOKA, Hiroki NAKAMURA
Estimating the term…
A semiconductor device includes a first and second fin-shaped semiconductor layers on a substrate. A first insulating film is around the first and second fin-shaped layers. A first and second pillar-shaped semiconductor layers reside on the first and second fin-shaped layers, respectively. A width of a bottom of the first pillar-shaped semiconductor layer is equal to a width of a top of the first fin-shaped semiconductor layer, and a width of a bottom of the second pillar-shaped semiconductor layer is equal to the width of a top of the second fin-shaped semiconductor layer. First and second gate insulating films and first and second metal gate electrodes reside around the first and second pillar-shaped layers, respectively. A metal gate line is connected to the first and second metal gate electrodes and extends in a direction perpendicular to the first and second fin-shaped layers.
A semiconductor device comprising:
Dependencies are inferred from the claim text.