Contact liners for integrated circuits and fabrication methods thereof
AssigneeGlobalfoundries Inc.
InventorHui ZANG
Life of this patent
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AssigneeGlobalfoundries Inc.
InventorHui ZANG
Estimating the term…
Contact liners for integrated circuits and fabrication methods thereof are presented. The methods include: fabricating an integrated circuit structure having a first transistor having at least one of a p-type source region or a p-type drain region and a second transistor having at least one of an n-type source region or an n-type drain region, and the fabricating including: forming a contact liner at least partially over both the first transistor and the second transistor, the contact liner including a first contact liner material and a second contact liner material, wherein the first contact liner material is selected to facilitate electrical connection to the at least one p-type source region or p-type drain region of the first transistor, and the second contact liner material is selected to facilitate electrical connection to the at least one n-type source region or n-type drain region of the second transistor.
A method comprising:
A structure comprising:
Dependencies are inferred from the claim text.