Multilevel mask circuit fabrication and multilayer circuit
AssigneeApplied Materials, Inc.
InventorsPing MEI, Carl A. TAUSSIG, Marcia ALMANZA-WORKMAN
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AssigneeApplied Materials, Inc.
InventorsPing MEI, Carl A. TAUSSIG, Marcia ALMANZA-WORKMAN
Estimating the term…
Circuit fabrication uses a multilevel mask to pattern a first conductor layer of a multilayer circuit. The first conductor patterning is to provide electrical isolation between the first conductor layer and a second conductor layer that one of overlies the multilevel mask and underlies the multilevel mask. With the second conductor layer overlying the multilevel mask, the electrical isolation is provided by undercutting the multilevel mask. Alternatively, with the second conductor underlying the multilevel mask, the first conductor includes a bridged gapped conductor and the electrical isolation may be provided by both the bridged gapped conductor and an insulating layer between the second conductor layer and the first conductor layer.
A method of multilevel mask circuit fabrication, the method comprising:
A circuit fabrication system comprising:
A multilayer circuit comprising:
Dependencies are inferred from the claim text.