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US 2016/0111319 A1Published application
Retainer, Method For Producing Same And Use Thereof
AssigneeCentrotherm Photovoltaics AG
InventorsHANS-PETER VOELK, ALEXANDER PIECHULLA, ULRICH WALK, JENS-UWE FUCHS, DIETER ZERNICKEL
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Abstract
A retainer has a coating composed of silicon carbide, glassy carbon or pyrolytic carbon on its surface. A method for producing the retainer and the use of the retainer in a plasma-driven vapor deposition are also provided.
Claims19
1-16. (canceled)
A retainer, comprising:
- a core material having a surface;
- and
- a coating disposed directly on said surface of said core material, said coating being composed of silicon carbide, glassy carbon or pyrolytic carbon.
A method for operating a plasma-driven vapor deposition installation, the method comprising the following steps:
- providing a retainer constructed as a vapor deposition boat;
- placing silicon substrates or silicon solar cell substrates in the boat;
- and
- carrying out a plasma-driven vapor deposition on the substrates in the boat.
1 more element
A method for producing a retainer, the method comprising the following steps:
- depositing silicon carbide as a coating on a volume material of the retainer by chemical vapor deposition.
Dependencies are inferred from the claim text.