US 2016/0111312 A1Published application

End effector

AssigneeKawasaki Jukogyo Kabushiki Kaisha

InventorsTetsuya YOSHIDA, Takeshi SHIBATA

Life of this patent

Estimating the term…

Loading patent…

Abstract

An end effector according to the present invention includes: a hand; a substrate holder provided on the hand; a mapping detector provided at distal end portions and of the hand; a light emitter, which the hand is provided with and which is configured to generate detection light; a light receiver, which the hand is provided with and which is configured to receive the detection light and convert the detection light into an electrical output; and an optical path formed such that the detection light emitted from the light emitter passes through the optical path to be incident on the light receiver; the optical path is formed such that detection light is blocked by a substrate detected in a cassette by the mapping detector, and such that detection light is blocked by a substrate held by the substrate holder.

Claims8

Dependent claims

An end effector comprising:

a hand;
a holder provided on the hand and configured to hold a first substrate;
a mapping detector provided at a distal end portion of the hand, the mapping detector being configured to face a second substrate stored in a cassette and detect presence or absence of the second substrate;
a light emitter, which the hand is provided with and which is configured to convert an electrical input to generate detection light;
a light receiver, which the hand is provided with and which is configured to receive the detection light and convert the detection light into an electrical output;
and
an optical path formed in the hand, through which the detection light emitted from the light emitter passes to be incident on the light receiver, wherein
the optical path is formed such that the detection light is blocked by the first substrate held by the holder, and such that the detection light is blocked by the second substrate detected by the mapping detector.

5 more elements

Dependencies are inferred from the claim text.

Facts

Application: 14/758,362Filed 25 Dec 2013
Priority: JP 2012-28669728 Dec 2012
Published: 21 Apr 2016
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

H10P 72/53
For positioning, orientation or alignment: using optical controlling means
B25J 15/0014
Gripping heads and other end effectors: having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
H10P 72/0606
Apparatus for monitoring, sorting, marking, testing or measuring: position monitoring, e.g. misposition detection or presence detection
H10P 72/0608
Position monitoring, e.g. misposition detection or presence detection: of substrates stored in a container, a magazine, a carrier, a boat or the like