Compositions of low-k dielectric sols containing nonmetallic catalysts
AssigneeSBA Materials, Inc.
InventorsMark L.F. Phillips, Travis Savage
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Abstract
A sol composition for producing a porous low-k dielectric material is provided. The composition can include at least one silicate ester, a polar solvent, water, an acid catalyst for silicate ester hydrolysis, an amphiphilic block copolymer surfactant, and a nonmetallic catalyst that reduces dielectric constant in the produced material. The composition can further include a metallic ion at a lower parts-per-million concentration than the nonmetallic catalyst, and/or the composition can further include a cosolvent. A method of preparing a thin film on a substrate using the sol composition is also provided.
Claims20
A sol composition for producing a porous low-k dielectric material, comprising:
- at least one silicate ester,
- a polar solvent,
- water,
- an acid catalyst for silicate ester hydrolysis,
- an amphiphilic block copolymer surfactant, and
- a nonmetallic catalyst that reduces dielectric constant in the produced material, provided that said nonmetallic catalyst is not a tertiary amine oxide.
Dependencies are inferred from the claim text.