Glass pallet for sputtering systems

A pallet for transporting a glass substrate through a sputtering apparatus, the pallet comprising:

• a frame;
• and
• an aperture in the frame,
• wherein the pallet is configured to hold the glass substrate by at least two edges, and in a substantially vertical orientation during transport through the sputtering apparatus,
• wherein the glass substrate has dimensions of between about 60 inches and about 130 inches along one side and between about 72 inches and 205 inches along an other side, and
• wherein the glass substrate has a thickness of between about 2 mm and about 20 mm.

An integrated sputter deposition system comprising:

• a plurality of deposition stations;
• a plurality of pallets, each pallet comprising:
• a frame with an aperture, and
• an adjustable grid array within the aperture, the adjustable grid array configurable to hold each of a plurality of glass substrates at at least two edges in a substantially vertical orientation during transport through the plurality of deposition stations;
• and
• a drive system for controlling movement of the plurality of pallets through the plurality of deposition stations.