Substrate for mounting gas supply components and methods thereof

A gas delivery substrate for mounting gas supply components of a gas delivery system for a semiconductor processing apparatus, the substrate comprising:

• a plurality of layers having major surfaces thereof bonded together forming a laminate, wherein the laminate includes openings, at least some of which are mounting holes, configured to receive and mount at least a first gas supply component, a second gas supply component, a third gas supply component, and a fourth gas supply component on an outer major surface;
• a first gas channel extending at least partially into an interior major surface;
• a second gas channel extending at least partially into a different interior major surface, wherein the first gas channel is at least partially overlapping the second gas channel;
• a first gas conduit including the first gas channel configured to connect the first gas supply component to the second gas supply component;
• and
• a second gas conduit including the second gas channel configured to connect the third gas supply component to the forth gas supply component.