Beam extraction slit structure and ion source
AssigneeSumitomo Heavy Industries Ion Technology Co., Ltd.
InventorMasateru Sato
Life of this patent
Estimating the term…
Abstract
A beam extraction slit structure includes a plasma chamber interior surface that is, in operation, in contact with a plasma; a plasma chamber exterior surface that faces an extraction electrode; and a slit surface part that forms a beam extraction slit between the plasma chamber interior surface and the plasma chamber exterior surface in the beam extraction direction. The slit surface part includes a plasma meniscus fixing part formed in an area of relatively higher plasma density in the slit longitudinal direction to fixingly maintain a plasma meniscus of the plasma and a plasma meniscus non-fixing part formed in an area of relatively lower plasma density in the slit longitudinal direction to movably maintain the plasma meniscus of the plasma in the beam extraction direction.
Claims11
A beam extraction slit structure of an ion source plasma chamber adjacent to an extraction electrode, the extraction electrode positioned across a gap from an elongated slit of the beam extraction slit structure in a beam extraction direction, the elongated slit arranged along a slit longitudinal direction perpendicular to the beam extraction direction, the beam extraction slit structure comprising:
- a plasma chamber interior surface that is, in operation, in contact with a plasma;
- a plasma chamber exterior surface that faces the extraction electrode;
- and
- an elongated slit surface that extends from the interior surface to the exterior surface in the beam extraction direction to define the elongated slit, the elongated slit surface including a plasma meniscus fixing part formed in a center of the elongated slit in the slit longitudinal direction to fixingly maintain a plasma meniscus of the plasma and a plasma meniscus non-fixing part formed in an end of the elongated slit in the slit longitudinal direction to movably maintain the plasma meniscus of the plasma in the beam extraction direction.
A beam extraction slit structure of an ion source plasma chamber adjacent to an extraction electrode, the extraction electrode positioned across a gap from an elongated slit of the beam extraction slit structure in a beam extraction direction, the elongated slit arranged along a slit longitudinal direction perpendicular to the beam extraction direction, the beam extraction slit structure comprising:
- a plasma chamber interior surface that is, in operation, in contact with a plasma;
- a plasma chamber exterior surface that faces the extraction electrode;
- and
- an elongated slit surface that extends from the interior surface to the exterior surface in the beam extraction direction to define the elongated slit, the elongated slit surface including a plasma meniscus fixing part formed in an area of relatively higher plasma density in the slit longitudinal direction to fixingly maintain a plasma meniscus of the plasma and a plasma meniscus non-fixing part formed in an area of relatively lower plasma density in the slit longitudinal direction to movably maintain the plasma meniscus of the plasma in the beam extraction direction.
Dependencies are inferred from the claim text.