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US 2016/0111248 A1Published application
Electron Microscope and Elemental Mapping Image Generation Method
AssigneeJEOL Ltd.
InventorsMasaki Morita, Akira Yasuhara
Life of this patent
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Abstract
An electron microscope includes an acquisition section that acquires an electron microscope image of a specimen that includes a plurality of identical patterns, and a spectrum at each pixel of the electron microscope image, and an elemental map generation section that adds up the spectrum at each pixel of each of a plurality of areas that are included in the electron microscope image and have an identical size to generate an elemental mapping image of the specimen.
Claims6
An electron microscope comprising:
- an acquisition section that acquires an electron microscope image of a specimen that includes a plurality of identical patterns, and a spectrum at each pixel of the electron microscope image;
- and
- an elemental map generation section that adds up the spectrum at each pixel of each of a plurality of areas that are included in the electron microscope image and have an identical size to generate an elemental mapping image of the specimen.
An elemental mapping image generation method comprising:
- an acquisition step that acquires an electron microscope image of a specimen that includes a plurality of identical patterns, and a spectrum at each pixel of the electron microscope image;
- and
- an elemental map generation step that adds up the spectrum at each pixel of each of a plurality of areas that are included in the electron microscope image and have an identical size to generate an elemental mapping image of the specimen.
An electron microscope comprising:
- an acquisition section that acquires an electron microscope image of a specimen that includes a plurality of identical patterns;
- and
- an image generation section that adds up images respectively included in a plurality of areas that are included in the electron microscope image and have an identical size.
Dependencies are inferred from the claim text.