Method of forming amorphous carbon monolayer and electronic device including amorphous carbon monolayer
AssigneeSamsung Electronics Co., Ltd.
InventorsWonjae JOO, Unjeong KIM, Sungwoo HWANG
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Abstract
A method of forming an amorphous carbon monolayer (ACM) and an electronic device including the ACM are provided. The method includes forming the ACM on a surface of a germanium (Ge) substrate via a chemical vapor deposition (CVD) process. The CVD process includes injecting a reaction gas including carbon-containing gas and hydrogen (H2) gas in to a reaction chamber containing the Ge substrate, wherein a partial pressure of the H2 gas in the reaction chamber may range from 1 Torr to 30 Torr.
Claims32
A method of forming an amorphous carbon monolayer (ACM), the method comprising forming the ACM on a surface of a germanium (Ge) substrate via chemical vapor deposition (CVD) process,
- wherein the CVD process comprises injecting a reaction gas comprising carbon-containing gas and hydrogen (H2) gas into a reaction chamber containing the Ge substrate, and
- wherein a partial pressure of the H2 gas in the reaction chamber is in the range of from 1 Torr to 30 Torr.
A transistor device comprising:
- a substrate;
- an amorphous carbon monolayer (ACM) provided on the substrate;
- a source electrode and a drain electrode provided on respective sides of the ACM on the substrate;
- an insulating layer provided on the ACM;
- and
- a gate electrode provided on the insulating layer.
A gas sensor comprising:
- first and second electrodes that are spaced apart;
- and
- an amorphous carbon monolayer (ACM) that connects the first and second electrodes and is configured to function as a gas adsorption plate for a certain type of gas.
A transparent electrode structure comprising:
- a substrate;
- at least one amorphous carbon monolayer (ACM) provided on the substrate;
- and
- at least one graphene layer provided on the substrate.
A method of improving the electrical conductivity of a structure containing a graphene layer on a substrate, the method comprising either (1) forming at least one amorphous carbon monolayer (ACM) between the substrate and the graphene layer;
- or (2) forming at least one amorphous carbon monolayer (ACM) on the side of the graphene layer furthest from substrate.
Dependencies are inferred from the claim text.