X-ray source
AssigneeTorr Scientific Ltd.
InventorDavid Alan Bates
Life of this patent
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Abstract
An X-ray source comprising: an elongate tubular housing adapted to be fitted into a port of and extend into a chamber containing a sample to be analysed, said housing containing: an electron gun and a target mounted in the housing, the electron gun being arranged to direct electrons to a point on the target such that the target radiates X-rays; and a monochromator arranged to focus X-rays radiated from the target to a focal point on a sample in the chamber; wherein the monochromator is positioned, and comprises a material selected such that the target, the monochromator and the focal point on the sample are substantially in-line within the envelope of the tubular housing.
Claims14
An X-ray source comprising:
- an elongate tubular housing adapted to be fitted into a port of and extend into a chamber containing a sample to be analysed, said housing containing:
- an electron gun and a target mounted in the housing, the electron gun being arranged to direct electrons to a point on the target such that the target radiates X-rays;
- and
- a monochromator arranged to focus X-rays radiated from the target to a focal point on a sample in the chamber;
- wherein the tubular housing has an inner diameter (D) and a central axis along its length, and wherein the monochromator is positioned, and comprises a material selected such that the focal point of the X-rays on the sample lies at a radial distance from the central axis not greater than the radius (D/2) of the housing, and wherein the point on the target is also at a radial distance from the central axis not greater than the radius of the housing, such that the target, the monochromator and the focal point on the sample are all contained within a radial area not greater than the diameter of the housing.
The X-ray source of any preceding claim, wherein the tubular housing has a central axis along its length, and wherein the point on the target is positioned on the central axis, and wherein the monochromator is positioned and comprises a material selected such that the focal point of the X-rays on the sample also lies on the central axis.
The X-ray source of any preceding claim, wherein the tubular housing has an outside diameter of less than 35 mm.
The X-ray source of any preceding claim, wherein the target is a planar target arranged with a surface to receive electrons from the electron gun and to radiate X-rays towards the monochromator.
The X-ray source of any preceding claim, wherein the monochromator is a diffracting crystal.
An apparatus for X-ray analysis of a sample, comprising an X-ray source as defined above, a vacuum chamber comprising a port to which the housing of the X-ray source is mounted such that the X-ray source extends through the port into the vacuum chamber, wherein the sample to be analysed is, in use, located at the focal point of the X-rays from the monochromator.
Dependencies are inferred from the claim text.