Writing data verification method and multi-charged particle beam writing apparatus
AssigneeNuFlare Technology, Inc.
InventorKenichi YASUI
Life of this patent
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Abstract
In one embodiment, a writing data verification method is for verifying a conversion error due to data conversion from first writing data in a vector format based on design data to second writing data in a pixel format. The method includes converting the second writing data to third writing data in a vector format, performing an exclusive OR operation on the first writing data and the third writing data, enlarging a graphic of the first writing data to obtain an enlarged graphic and generating a tolerance region graphic from a difference between the enlarged graphic and the graphic of the first writing data, and detecting a defect by performing a mask process on a graphic generated by the exclusive OR operation with the tolerance region graphic.
Claims16
A writing data verification method for verifying a conversion error due to data conversion from first writing data in a vector format based on design data to second writing data in a pixel format, the method comprising:
- converting the second writing data to third writing data in a vector format;
- performing an exclusive OR operation on the first writing data and the third writing data;
- enlarging a graphic of the first writing data to obtain an enlarged graphic and generating a tolerance region graphic from a difference between the enlarged graphic and the graphic of the first writing data;
- and
- detecting a defect by performing a mask process on a graphic generated by the exclusive OR operation with the tolerance region graphic.
A multi-charged particle beam writing apparatus comprising:
- a writing section that writes a pattern by forming multi-beams of a plurality of charged particle beams, turning on or off each of the multi-beams individually, and irradiating an object with the charged particle beams;
- and
- a control section that controls the writing section based on second writing data in a pixel format converted from first writing data in a vector format based on design data, converts the second writing data to third writing data in a vector format, performs an exclusive OR operation on the first writing data and the third writing data, enlarges a graphic of the first writing data to obtain an enlarged graphic, forms a tolerance region graphic from a difference between the enlarged graphic and a graphic of the first writing data, and detects a defect by masking a graphic produced through the exclusive OR operation with the tolerance region graphic.
A writing data verification method for verifying a conversion error occurring when first writing data in a vector format based on design data to second writing data in a pixel format, the method comprising:
- converting the second writing data to third writing data in a vector format;
- obtaining an enlarged graphic by enlarging a graphic of the first writing data;
- detecting a defect by performing an exclusive OR operation on the enlarged graphic and a graphic of the third writing data.
Dependencies are inferred from the claim text.