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US 2016/0109807 A1Published application
Optical component
AssigneeCarl Zeiss SMT GmbH
InventorJohannes Eisenmenger
Life of this patent
Estimating the term…
Abstract
The disclosure provides an optical component that includes an optical element fixed in the transverse direction in a frame. The frame has a linear expansion of at most 0.01% in the transverse direction even in the case of a linear expansion of the optical element in the transverse direction by up to 1%.
Claims23
An optical component, comprising:
- an optical element;
- and
- a frame,
- wherein:
- the optical element is mounted to the frame;
- the optical element extends perpendicular to a first direction;
- a central region of the optical element is freely accessible along the first direction;
- relative a second direction which is perpendicular to the first direction, a first location of the optical element is opposite a second location of the optical element;
- the optical element is fixed to the frame at the first and second locations of the optical element;
- the optical component is configured so that:
- when the optical element expands linearly in the second direction by up to 1%, the frame expands linearly in the second direction by at most 0.01%;
- and
- the frame is displaceable in the first direction.
10 more elements
An optical component, comprising:
- an optical element;
- and
- a frame,
- wherein:
- the optical element is mounted to the frame;
- the optical element extends perpendicular to a first direction;
- a central region of the optical element is freely accessible along the first direction;
- the optical element has first and second locations;
- the optical element is fixed to the frame at the first and second locations of the optical element;
- the optical component is configured so that, when the optical element expands linearly in the second direction by up to 1%, the frame expands linearly in the second direction by at most 0.01%;
- and
- the optical component is configured so that the frame so that it is displaceable in the first direction.
9 more elements
An optical component, comprising:
- an optical element;
- and
- a frame,
- wherein:
- the optical element is mounted to the frame at two locations so that the optical element is displaceable in a first direction;
- a central region of the optical element is freely accessible along the first direction;
- the optical component is configured so that, when the optical element expands linearly in the second direction by up to 1%, the frame expands linearly in the transverse direction by at most 0.01%.
4 more elements
Dependencies are inferred from the claim text.