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US 2016/0109800 A1Published application
Photoresist compositions and methods of forming photolithographic patterns
AssigneeRohm and Haas Electronic Materials LLC
InventorsYoung Cheol BAE, Deyan WANG, Thomas CARDOLACCIA, Seokho KANG, Rosemary BELL
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Abstract
Provided are photoresist compositions useful in forming photolithographic patterns by a negative tone development process. Also provided are methods of forming photolithographic patterns by a negative tone development process and substrates coated with the photoresist compositions. The compositions, methods and coated substrates find particular applicability in the manufacture of semiconductor devices.
Claims20
A photoresist composition, comprising:
- a first polymer which is acid sensitive;
- a second polymer formed from a monomer having the following general formula (I):
- wherein:
- P is a polymerizable functional group;
- Z is a spacer unit chosen from optionally substituted linear or branched aliphatic and aromatic hydrocarbons, and combinations thereof, optionally with one or more linking moiety chosen from —O—, —S—, —COO— and —CONR1—, wherein R1 is chosen from hydrogen and substituted and unsubstituted C1 to C10 linear, branched and cyclic hydrocarbons;
- n is an integer from 0 to 5;
- and R is chosen from substituted and unsubstituted C1 to C20 linear, branched and cyclic hydrocarbons;
- wherein the second polymer is acid insensitive and free of fluorine and silicon, and wherein the second polymer has a surface energy lower than a surface energy of the first polymer;
- a photoacid generator;
- and
- a solvent.
8 more elements
Dependencies are inferred from the claim text.