Mask, method of manufacturing the same, and method of manufacturing a display panel using the same
AssigneeSamsung Dispaly Co., Ltd.
InventorsYONG SON, MIN KANG, BONG-YEON KIM, HYUN-JOO LEE, JIN-HO JU
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Abstract
A mask includes a transparent substrate and a light blocking pattern. The light blocking pattern includes a light blocking part and a diffraction pattern. The light blocking part is disposed on the transparent substrate and is configured to block light. The diffraction pattern includes a plurality of protrusion parts and is configured to diffract the light. The plurality of protrusion parts protrudes from a side of the blocking part and is separated from each other.
Claims20
A mask comprising:
- a transparent substrate;
- and
- a light blocking pattern,
- wherein the light blocking pattern comprises:
- a light blocking part disposed on the transparent substrate, wherein the light blocking part is configured to block light;
- and
- a diffraction pattern including a plurality of protrusion parts, wherein the diffraction pattern is configured to diffract the light, and the plurality of protrusion parts protrudes from a side of the light blocking part and each of the plurality of protrusion parts is separated from each other.
A method of manufacturing a mask, the method comprising:
- forming a light blocking metal layer on a transparent substrate;
- coating a first photoresist material on the light blocking metal layer to form a first photoresist layer;
- irradiating the first photoresist layer using a laser beam to cure a first area and a second area, wherein the second area includes a plurality of protrusion areas protruding from a side of the first area, and each of the plurality of protrusion areas is separated from each other;
- developing the first photoresist layer to form a first photo pattern;
- and
- etching the light blocking metal layer by using the first photo pattern as a mask to form a light blocking pattern including a light blocking part and a diffraction pattern,
- wherein the light blocking part corresponds to the first area, and the diffraction pattern corresponds to the second area.
A method of manufacturing a display panel, the method comprising:
- forming a metal layer on a base substrate;
- coating a first photoresist material on the metal layer to form a first photoresist layer;
- exposing the first photoresist layer by using a plurality of masks including a transparent substrate and a light blocking pattern;
- and
- developing the first photoresist layer to form a first photo pattern,
- wherein the light blocking pattern includes a light blocking part and a diffraction pattern,
- wherein the light blocking part is disposed on the transparent substrate and is configured to block light,
- wherein the diffraction pattern includes a plurality of protrusion parts and is configured to diffract the light, and
- wherein the plurality of protrusion parts protrudes from a side of the light blocking part and each of the plurality of protrusion parts is separated from each other.
A method of manufacturing a display panel, the method comprising:
- forming a metal layer on a base substrate;
- coating a first photoresist material on the metal layer to form a first photoresist layer;
- exposing the first photoresist layer by using a plurality of masks including a light blocking part and a diffraction pattern;
- and
- developing the first photoresist layer to form a first photo pattern,
- wherein the light blocking part is configured to block light, and the diffraction pattern is configured to diffract the light, and
- wherein the plurality of masks is separated from each other by a distance that is substantially within a range of 2.5 μm to 3.5 μm.
Dependencies are inferred from the claim text.