Oxide capacitor electro-optical phase shifter
OwnerJean-Robert Manouvrier, Frederic Boeufinventors
Life of this patent
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Abstract
An electro-optical phase shifter to be located in an optical waveguide may include a rib of a semiconductor material extending along a length of the optical waveguide and a control structure configured to modify a concentration of carriers in the rib according to a control voltage present between first and second control terminals of the phase shifter. The control structure may include a conductive layer covering a portion of the rib and electrically connected to a first of the control terminals. An insulating layer may be configured to electrically isolate the conductive layer from the rib.
Claims24
1-12. (canceled)
A method of making an electro-optical phase shifter associated with an optical waveguide, the method comprising:
- forming a control structure to modify a concentration of carriers in a rib according to a control voltage present between first and second control terminals, the rib comprising a semiconductor material along a length of the optical waveguide, forming the control structure comprising
- forming at least one conductive layer to cover at least a portion of the rib and be electrically coupled to the first control terminal, and
- forming at least one insulating layer coupled to and between the rib and the at least one conductive layer to electrically isolate the at least one conductive layer from the rib, the at least one conductive layer and at least one insulating layer being coextensive.
A method of making an electro-optical phase shifter comprising:
- forming a control structure to modify a concentration of carriers in a rib according to a control voltage by at least
- forming at least one conductive layer to cover at least a portion of the rib, and
- forming at least one insulating layer coupled to and between the rib and the at least one conductive layer to electrically isolate the at least one conductive layer from the rib, the at least one conductive layer and at least one insulating layer being coextensive.
A method of making an electro-optical phase shifter comprising:
- forming a control structure to modify a concentration of carriers in a rib according to a control voltage by at least
- forming at least one conductive layer to cover at least a portion of the rib, and
- forming at least one insulating layer coupled to and between the rib and the at least one conductive layer to electrically isolate the at least one conductive layer from the rib, the at least one conductive layer and at least one insulating layer having a same height as the rib.
Dependencies are inferred from the claim text.