Processing apparatus
AssigneeCanon Kabushiki Kaisha
InventorYoichiro Imai
Life of this patent
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Abstract
The present invention provides a processing apparatus that processes an object by scanning light on the object, the apparatus comprising a scanning device including a mirror for reflecting the light and configured to scan the light by driving the mirror, and a controller configured to control the scanning device, wherein the controller is configured to obtain, based on a target scanning velocity, an angle of the mirror at which the scanning device is caused to start driving of the mirror, so that an angle of the mirror, at which scanning of the light is started, is a target angle.
Claims11
A processing apparatus that processes an object by scanning light on the object, the apparatus comprising:
- a scanning device including a mirror for reflecting the light and configured to scan the light by driving the mirror;
- and
- a controller configured to control the scanning device,
- wherein the controller is configured to obtain, based on a target scanning velocity, an angle of the mirror at which the scanning device is caused to start driving of the mirror, so that an angle of the mirror, at which scanning of the light is started, is a target angle.
A processing apparatus that processes an object by scanning light on the object, the apparatus comprising:
- a scanning device including a mirror for reflecting the light and configured to scan the light by driving the mirror;
- and
- a controller configured to control the scanning device,
- wherein the controller is configured to obtain, based on a target scanning velocity, a time from start of driving of the mirror to start of scanning of the light, so that an angle of the mirror, at which scanning of the light is started, is a target angle.
Dependencies are inferred from the claim text.