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US 2016/0109658 A1Published application
Photonics grating coupler and method of manufacture
AssigneeMicron Technology, Inc.
InventorHarel Frish
Life of this patent
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Abstract
A structure for coupling an optical signal between an integrated circuit photonic structure and an external optical fiber is disclosed as in a method of formation. The coupling structure is sloped relative to a horizontal surface of the photonic structure such that light entering or leaving the photonic structure is substantially normal to its upper surface.
Claims21
A method of forming a photonic structure, the method comprising:
- forming a lower cladding material over an upper surface of a supporting substrate;
- forming a waveguide core having a horizontal portion and a contiguous sloped portion over the lower cladding material;
- and
- forming an optical grating in the sloped portion of the waveguide core, the sloped portion and the optical grating configured such that light emitted by the grating is in a direction substantially normal to a surface of the horizontal portion of the waveguide core.
1 more element
A method of forming a photonic coupler, the method comprising:
- forming a lower cladding material over an upper surface of a supporting substrate, the lower cladding material having a horizontal portion and a sloped portion coupled to the horizontal portion;
- forming a waveguide core material over the lower cladding material such that the waveguide core material has a horizontal portion and a sloped portion coupled to the horizontal portion;
- and
- forming a grating coupler in the sloped portion of the waveguide core such that the grating coupler is configured to transmit or receive light passing through the waveguide core.
1 more element
A photonic structure comprising:
- a substrate;
- a photonic element supported by the substrate and having a horizontal portion and a sloped portion coupled to the horizontal portion;
- and
- a grating formed at the sloped portion for directing light into or out of the photonic element,
- wherein the direction of light travel out of the grating is substantially normal to the direction of travel of light in the horizontal portion of the photonic element.
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Dependencies are inferred from the claim text.