Electrical contacting device
AssigneeFeinmetall GmbH
InventorsGunther BÖHM, Georg STEIDLE, Wolfgang SCHÄFER, Achim WEILAND
Life of this patent
Estimating the term…
Abstract
An electrical contacting device for electrical physical contact with a specimen, particularly wafers, taking place in a contacting direction, with at least one conductor substrate which can be electrically connected to a testing device, at least one contact distance transformer and at least one contact head having electrical contact elements, particularly resilient contact elements, preferably serving to compensate different physical contact distances existing in the contacting direction particularly at the contact elements.
Claims19
1-15. (canceled)
An electrical contacting device for electrical physical contact with a specimen, taking place in a contacting direction, the testing device comprising:
- at least one conductor substrate which can be electrically connected to the testing device;
- at least one contact distance transformer;
- and
- at least one contact head having electrical contact elements;
- the contact head arranged between the conductor substrate and the contact distance transformer, and with a middle centering device of the contact distance transformer;
- wherein at least two leaf spring elements respectively enclosing an acute angle, each leaf spring including a first end region, the respective end regions arranged so as to be displaceably inserted in an associated lateral recess lying on different sides of the contact distance transformer.
The electrical contacting device as set forth in claim 1, wherein the respective leaf spring element has a leaf surface that runs transverse, particularly at a right angle or at a substantially right angle, to the contacting direction.
Dependencies are inferred from the claim text.