Cantilever Microprobes For Contacting Electronic Components

A compliant probe for making contact with an electronic circuit element, the probe comprising:

• a post element having a proximal end;
• a cantilever portion comprising a solid section and a plurality of beam elements, the solid section having a first thickness greater than a thickness of any of the beam elements,
• wherein the plurality of beam elements connect to the post element,
• wherein the solid section connects a distal end of at least a first beam element to an intermediate portion of a second beam element,
• wherein a connection element connects a distal end of the second beam element to a distal end of a third beam element;
• and
• a contact portion functionally connected to the connection element,
• wherein the plurality of beam elements are spaced by a gap and are laterally extending.

A compliant probe for making contact with an electronic circuit element, the probe comprising:

• a post element having a proximal end;
• a cantilever portion comprising a solid section and a plurality of beam elements, the solid section having a first thickness greater than a thickness of any beam element of the plurality of beam elements and each beam element having a proximal end and a distal end,
• wherein at least two beam elements of the plurality of beam elements functionally connect to the post element,
• wherein a connection element connects to distal ends of the at least two beam elements of the plurality of beam elements,
• wherein the solid section is spaced from the connection element by at least a portion of a beam length and connects to at least one of a distal end or a proximal end of at least one beam element of the plurality of beam elements;
• and
• a contact portion functionally connected to the connection element,
• wherein the plurality of beam elements are spaced by a gap and are laterally extending.