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US 2016/0109477 A1Published application
Method and Apparatus of Tuning a Scanning Probe Microscope
AssigneeBruker Nano, Inc.
InventorsChanmin Su, Paul Silva, Lin Huang, Bede Pittenger, Shuiqing Hu
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Abstract
An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.
Claims1
A method of operating a scanning probe microscope (SPM) comprising:
- tuning the SPM to determine an operating frequency of a drive of the SPM by plotting thermal data having a thermal peak on top of a conventional tuning curve;
- and
- wherein the tuning curve has two peaks separated by a valley, and wherein the operating frequency is at about a midpoint on a downslope of the valley corresponding to the thermal peak.
Dependencies are inferred from the claim text.