Microcantilever Based Selective Volatile Organic Compound (VOC) Sensors and Methods
AssigneeUniversity of South Carolina
InventorsGoutam Koley, Ifat Jahangir
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Abstract
Microcantilevers and systems incorporating the microcantilevers are described that can be utilized to perform selective detection of VOCs. The systems can detect VOCs at temperatures below the auto-ignition temperature of the VOCs and the microcantilevers need not be functionalized with any reactive groups particularly designed for the VOCs to be detected. The microcantilevers are triangular microcantilevers that can be formed of high bandgap semiconductors such as AlGaN/GaN heterojunction semiconductors.
Claims25
A system for identifying a volatile organic compound, the system comprising:
- a fluid flow path configured for carrying a volatile organic compound;
- a power source configured for supplying a driving voltage;
- and
- a triangular microcantilever held in the fluid flow path and in electrical communication with the power source, the microcantilever comprising a first arm extending from a base, a second arm extending from the base, and a tip at a junction of the first arm and the second arm, wherein upon contact between the microcantilever and the volatile organic compound in conjunction with application of the driving voltage to the microcantilever, the first arm exhibits a first electrical resistance, the second arm exhibits a second electrical resistance, and the tip exhibits a third electrical resistance, the third electrical resistance differing from the first and second electrical resistances.
A method for detecting a volatile organic compound comprising:
- contacting a gas or vapor containing a volatile organic compound with a triangular microcantilever, the microcantilever comprising a first arm extending from a base, a second arm extending from the base, and a tip at a junction of the first arm and the second arm;
- applying a voltage across the microcantilever and thereby heating the microcantilever to a temperature at which condensate of the volatile organic compound can vaporize;
- monitoring one or more electrical characteristics of the microcantilever to determine a threshold voltage at which the one or more electrical characteristics exhibits a detectable change, the threshold voltage being indicative of the volatile organic compound.
Dependencies are inferred from the claim text.