Enclosed x-ray imaging system
AssigneeNikon Metrology NV
InventorsKazuaki SUZUKI, Daniel HILTON
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AssigneeNikon Metrology NV
InventorsKazuaki SUZUKI, Daniel HILTON
Estimating the term…
According to the present disclosure, there is provided an x-ray imaging system, comprising: an x-ray source; an x-ray detector; a sample mount for mounting a sample in a beam path between the x-ray source and the x-ray detector; an enclosure enclosing at least the sample mount in an interior of the enclosure; and a climate control system for regulating the climate inside the enclosure, wherein: the enclosure has an aperture for enabling access to at least the sample mount from outside the enclosure; the enclosure is provided with a door operable between an open position in which the aperture is open and a closed position in which the aperture is closed by the door; and the climate control system is operable to provide a positive pressure differential between the interior of the enclosure and an exterior of the enclosure such that the interior of the enclosure is maintained at a higher pressure than the exterior of the enclosure when the door is open. Such a system is able to better regulate the temperature inside the enclosure even when the door is opened.
An x-ray imaging system, comprising:
Dependencies are inferred from the claim text.