Inspection apparatus, inspection method, and storage medium

An inspection method for an inspection apparatus configured to inspect a plurality of inspection objects, the inspection method comprising:

• measuring, as a first measuring, terahertz waves transmitted through the plurality of respective inspection objects or reflected by the plurality of respective inspection objects;
• determining whether a predetermined condition is satisfied by using a measurement result of the first measuring;
• separating the plurality of inspection objects into an inspection object that satisfies the predetermined condition and an inspection object that does not satisfy the predetermined condition based on a determination result of the determining portion;
• and
• measuring, as a second measuring, a time waveform of a terahertz-wave pulse transmitted through a separated inspection object that does not satisfy the predetermined condition or a terahertz-wave pulse reflected by the separated inspection object that does not satisfy the predetermined condition.

A computer-readable storage medium storing a program to cause a computer to perform an inspection method for an inspection apparatus configured to inspect a plurality of inspection objects, the inspection method comprising:

• measuring, as a first measuring, terahertz waves transmitted through the plurality of respective inspection objects or reflected by the plurality of respective inspection objects;
• determining whether a predetermined condition is satisfied by using a measurement result of the first measuring;
• separating the plurality of inspection objects into an inspection object that satisfies the predetermined condition and an inspection object that does not satisfy the predetermined condition based on a determination result of the determining portion;
• and
• measuring, as a second measuring, a time waveform of a terahertz-wave pulse transmitted through a separated inspection object that does not satisfy the predetermined condition or a terahertz-wave pulse reflected by the separated inspection object that does not satisfy the predetermined condition.