Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device
AssigneeSTMicroelectronics S.r.l.
InventorsMarco Garbarino, Andrea Donadel, Davide Magnoni, Carlo Valzasina
Life of this patent
Estimating the term…
Abstract
A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition.
Claims20
A method of controlling a microelectromechanical device, comprising:
- oscillating a movable mass with respect to a body according to a degree of freedom, the movable mass being elastically coupled to the body;
- detecting a current oscillation frequency of the movable mass using a frequency detector;
- and
- providing energy to the movable mass by a forcing stage, capacitively coupled to the movable mass, through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition.
A method of controlling a microelectromechanical device, comprising:
- oscillating a movable mass with respect to a body according to a degree of freedom;
- detecting a current oscillation frequency of the movable mass;
- and
- providing energy to the movable mass through forcing signals having a forcing frequency equal to the detected current oscillation frequency in a first transient operating condition.
A method of controlling a microelectromechanical device, comprising:
- oscillating a movable mass with respect to a body according to a degree of freedom;
- detecting a current oscillation frequency of the movable mass;
- providing energy to the movable mass through forcing signals having a forcing frequency equal to the detected current oscillation frequency in a first transient operating condition;
- providing a reference clock signal independent of oscillations of the movable mass;
- and
- generating the forcing signals on the basis of the reference clock signal in a second transient operating condition.
Dependencies are inferred from the claim text.