Yaw-rate sensor

A sensor comprising:

• a substrate;
• a plurality of movable masses that are mounted over a surface of the substrate;
• a frame;
• a plurality of detectors configured to detect deflections of the movable masses, the deflections including (a) deflections caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a first axis and (b) deflections caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a second axis that is perpendicular to the first axis;
• a first spring that directly connects two of the masses to each other;
• and
• at least one second spring via which the frame is connected to at least one of the two masses, to which the frame is external.

A sensor comprising:

• a substrate;
• a plurality of movable masses that are mounted over a surface of the substrate;
• a frame connected to at least one of the two masses, to which the frame is external;
• a plurality of detectors configured to detect deflections of the movable masses, the deflections including (a) deflections caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a first axis, (b) deflections caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a second axis that is perpendicular to the first axis, and (c) deflections caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a third axis that is perpendicular to the first and second axes;
• a first spring arrangement, which is a central spring arrangement that the plurality of masses surround and by which all of the plurality of masses are connected to each other;
• and
• a second spring arrangement by which two of the masses are connected to each other.