Shape measuring device using frequency scanning interferometer

A shape measuring device, comprising:

• a light source unit that generates a light and changes a wavelength of the light;
• a light splitting unit that splits the light generated from the light source unit into at least a reference light and a measurement light;
• a reference mirror that reflects the reference light;
• and
• a light receiving unit that receives the reference light reflected by the reference mirror so as to form a reference light path and the measurement light reflected by a measurement target object so as to form a measurement light path;
• wherein the measurement target object is light-transmitting.

A shape measuring device, comprising:

• a light source unit that generates a light and changes a wavelength of the light;
• a first light path changing unit that enables a first light, which is a portion of the light generated from the light source unit, to have a first light path;
• a second light path changing unit that enables second light, which is at least a portion of the light generated from the light source unit and is different from the first light, to have a second light path by being reflected by a measurement target object formed on a substrate;
• and
• a light receiving unit that receives the first light passing through the first light path and the second light passing through the second light path;
• wherein the measurement target object is light-transmitting.