Composite substrate, method for fabricating same, function element, and seed crystal substrate
AssigneeNKG Insulators, Ltd.
InventorsYoshitaka Kuraoka, Yasunori Iwasaki, Takashi Yoshino
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Abstract
A composite substrate includes a polycrystalline ceramic substrate, a silicon substrate directly bonded to the polycrystalline ceramic substrate, a seed crystal film formed on the silicon substrate by vapor phase process and made of a nitride of a group 13 element, and a gallium nitride crystal layer grown on the seed crystal film by flux method.
Claims13
A method for manufacturing a composite substrate, said method comprising the steps of:
- thinning a silicon substrate of a composite body, said composite body comprising a polycrystalline ceramic substrate and said silicon substrate directly bonded with each other;
- depositing a seed crystal film comprising a nitride of a group 13 element on said silicon substrate by a gas-phase method;
- and
- growing a gallium nitride crystal layer on said seed crystal film by a flux method.
A method of manufacturing a functional element, said method comprising the steps of:
- thinning a silicon body of a composite body, said composite body comprising a polycrystalline ceramic substrate and said silicon substrate directly bonded with each other;
- depositing a seed crystal film comprising a nitride of a group 13 element on said silicon substrate by a gas-phase method;
- growing a gallium nitride crystal layer on said seed crystal film by a flux method;
- and
- forming a functional layer comprising a nitride of a group 13 element on said gallium nitride crystal layer by a gas-phase method.
A method for manufacturing a seed crystal substrate, said method comprising the steps of:
- thinning a silicon substrate of a composite body, said composite body comprising a polycrystalline ceramic substrate and said silicon substrate directly bonded with each other;
- and
- depositing a seed crystal film comprising a nitride of a group 13 element on said silicon substrate by a gas-phase method.
Dependencies are inferred from the claim text.