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US 2016/0108524 A1Published application
High-speed deposition of mixed oxide barrier films
AssigneeLotus Applied Technology, LLC
InventorsEric R. Dickey, Bryan Larson Danforth
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Abstract
The present disclosure relates to metal oxide barrier films and particularly to high-speed methods for depositing such barrier films. Methods are disclosed that are capable of producing barrier films with water vapor transmission rates (WVTR) below 0.1 g/(m2·day). Methods are disclosed for continuously transporting a substrate within an atomic layer deposition (ALD) reactor and performing a limited number of ALD cycles to achieve a desired WVTR.
Claims20
A method of forming a barrier layer on a substrate, the method comprising:
- continuously transporting the substrate at a speed of at least about 2 meters per second (m/s) within an atomic layer deposition (ALD) reactor;
- and
- depositing one of alumina or titania on a portion of the substrate in a first ALD cycle, while the substrate is moving;
- and
- depositing the other one of alumina or titania on the same portion of the substrate in a second ALD cycle, while the substrate is moving,
- repeating the deposition steps for a total of about 50 or less ALD cycles, thereby forming a barrier layer comprising alumina and titania and having a water vapor transmission rate (WVTR) of less than about 0.1 g/(m2·day).
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A method of forming a barrier layer on a substrate, the method comprising:
- continuously transporting the substrate at a speed of at least about 2 meters per second (m/s) within an atomic layer deposition (ALD) reactor;
- exposing a portion of the substrate to one of an isopropoxide or a metalorganic;
- exposing the same portion of the substrate to an oxygen- and nitrogen-containing plasma;
- exposing the same portion of the substrate to the other of the isopropoxide and the metalorganic;
- exposing the same portion of the substrate again to an oxygen- and nitrogen-containing plasma, thereby forming a mixed oxide barrier layer having a thickness of at least about 3 nm after about 50 or less ALD cycles.
2 more elements
Dependencies are inferred from the claim text.