Method and apparatus for producing nanostructures, and substrate structure including nanostructures

An apparatus for producing nanostructures, the apparatus comprising

• a vacuum chamber in which the nanostructures are to be formed;
• a crucible in which a material is to be placed, where the crucible is disposed in the vacuum chamber;
• an electron gun disposed in the vacuum chamber, where the electron gun is configured to apply electron beams to the material in the crucible so as to evaporate the material;
• a stage disposed in the vacuum chamber so as to face the crucible, where the stage bears a member on or over which the evaporated material is to be deposited, and where the stage is pivotally supported and is arranged so as to face the crucible at a variable angle;
• a cooling unit that cools the stage;
• a heating unit that heats the stage;
• a temperature sensor that detects a temperature of the stage;
• and
• a controller that operates the cooling unit and the heating unit based on the temperature detected by the temperature sensor so as control the temperature of the stage.

A nanostructure-containing substrate structure comprising:

• a substrate having a flat surface;
• and
• a plurality of nanostructures disposed vertically on or over the flat surface of the substrate,
• the plurality of nanostructures each having a diameter of less than 100 nm,
• the plurality of nanostructures comprising a main material having a melting point equal to or lower than a melting point of copper.