Coated article with low-e coating having barrier layer system(s) including multiple dielectric layers, and/or methods of making the same

A heat treatable coated article, comprising a multilayer thin film coating supported by a glass substrate, the coating comprising, in order moving away from the substrate:

• a first dielectric layer;
• a second dielectric layer comprising titanium oxide split by a third dielectric layer comprising zinc oxide so as to form first and second portions of the second dielectric layer, the second portion being further from the glass substrate than is the first portion, so that the third dielectric layer comprising zinc oxide is located between and contacting the first and second portions of the titanium oxide;
• another layer comprising zinc oxide located over and contacting the second portion of the second dielectric layer comprising titanium oxide;
• a metallic or substantially metallic infrared (IR) reflecting layer comprising silver over and directly contacting the another layer comprising zinc oxide, wherein the coating contains only one IR reflecting layer comprising silver;
• an upper contact layer directly over and contacting the IR reflecting layer;
• and
• at least another dielectric layer over the upper contact layer.