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US 2016/0107879 A1Published application
Electronic device with suspended mass
AssigneeInfineon Technologies AG
InventorThoralf Kautzsch
Life of this patent
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Abstract
An electronic device is based on a single crystal semiconductor substrate. A cavity is formed in the semiconductor substrate. Further, a movably suspended mass is defined by one or more trenches extending from one side of the semiconductor substrate to the cavity. A first electrode layer is provided on the suspended mass. Further, a cover layer covering the suspended mass is provided. The cover layer includes a second electrode layer arranged opposite to the first electrode layer and spaced therefrom by a gap.
Claims20
An electronic device, comprising:
- a single crystal semiconductor substrate;
- a cavity formed in the semiconductor substrate;
- a movably suspended mass defined in the semiconductor substrate by one or more trenches extending from one side of the semiconductor substrate to the cavity;
- a first electrode layer on the suspended mass;
- and
- a cover layer covering the suspended mass and including a second electrode layer arranged opposite to the first electrode layer and spaced therefrom by a gap.
3 more elements
A method of manufacturing an electronic device, the method comprising:
- forming a cavity in a single crystal semiconductor substrate;
- defining a movably suspended mass by one or more trenches extending from one side of the semiconductor substrate to the cavity;
- providing a first electrode layer on the suspended mass;
- and
- providing a cover layer covering the suspended mass and including a second electrode layer arranged opposite to the first electrode layer and spaced therefrom by a gap.
2 more elements
Dependencies are inferred from the claim text.