Method of making inkjet print heads having inkjet chambers and orifices formed in a wafer and related devices
AssigneeSTMicroelectronics S.r.l.
InventorsMURRAY J. ROBINSON, KENNETH J. STEWART
Life of this patent
Estimating the term…
Abstract
A method of making inkjet print heads may include forming recesses in a first surface of a first wafer to define inkjet chambers. The method may also include forming openings extending from a second surface of the first wafer through to respective ones of the inkjet chambers to define inkjet orifices. The method may further include forming a second wafer including ink heaters, and joining the first and second wafers together so that the ink heaters are aligned within respective inkjet chambers to thereby define the inkjet print heads.
Claims24
1-20. (canceled)
An inkjet print head comprising:
- a first substrate comprising monocrystalline silicon with a <100> crystalline orientation and having a plurality of recesses in a first surface thereof to define a plurality of inkjet chambers;
- said first substrate also having a plurality of openings extending from a second surface thereof through the first substrate to respective ones of the inkjet chambers to define a plurality of inkjet orifices;
- and
- a second substrate joined to said first substrate, said second substrate including a plurality of ink heaters being aligned within respective inkjet chambers.
An inkjet print head comprising:
- a first substrate comprising monocrystalline silicon having a plurality of recesses in a first surface thereof to define a plurality of inkjet chambers each having a trapezoidal cross-sectional shape;
- said first substrate also having a plurality of openings extending from a second surface thereof through the first substrate to respective ones of the inkjet chambers to define a plurality of inkjet orifices;
- and
- a second substrate joined to said first substrate, said second substrate including a plurality of ink heaters being aligned within respective inkjet chambers.
An inkjet print head comprising:
- a first monocrystalline silicon substrate having a plurality of recesses in a first surface thereof to define a plurality of inkjet chambers;
- said first monocrystalline silicon substrate also having a plurality of openings extending from a second surface thereof through the first monocrystalline silicon substrate to respective ones of the inkjet chambers to define a plurality of inkjet orifices;
- a second monocrystalline silicon substrate including a plurality of ink heaters being aligned within respective inkjet chambers;
- and
- an adhesion layer joining said first and second monocrystalline silicon substrates together and comprising a photosensitive polymer layer.
Dependencies are inferred from the claim text.