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US 2016/0107288 A1Published application
Printed chemical mechanical polishing pad
AssigneeApplied Materials, Inc.
InventorsMahendra Christopher ORILALL, Timothy MICHAELSON, Kasiraman KRISHNAN, Rajeev BAJAJ, Nag B. PATIBANDLA, Daniel REDFIELD, Fred C. REDEKER, Gregory E. MENK
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Abstract
A method of fabricating a polishing layer of a polishing pad includes successively depositing a plurality of layers with a 3D printer, each layer of the plurality of polishing layers deposited by ejecting a base material from a first nozzle and an additive material from a second nozzle and solidifying the base and additive material to form a solidified pad material.
Claims20
A method of fabricating a polishing pad comprising:
- depositing a plurality of layers with a 3D printer, at least a first layer of the plurality of polishing layers comprises a base material and an additive material;
- and
- solidifying the plurality of layers to form a solidified polishing layer.
A polishing pad comprising:
- a polishing layer comprising:
- a plurality of 3D printer deposited layers, wherein a first layer of the plurality of layers comprises:
- a base material;
- and
- one or more additive materials, the additive material modifying at least one property of the polishing layer selected from the group consisting of porosity, stiffness, surface energy, abrasiveness, conductivity, and chemical functionality.
2 more elements
Dependencies are inferred from the claim text.