Corrosion resistant abatement system

An abatement system, comprising:

• a foreline, wherein an inside surface of the foreline is coated with yttrium oxide or diamond-like carbon;
• and
• a plasma source coupled to the foreline, wherein the plasma source comprises:
• a body including an inlet fluidly coupled to an outlet, wherein the body further includes inside surfaces, and the inside surfaces are coated with yttrium oxide or diamond-like carbon;
• and
• a flow splitter disposed in the body in a position that formed two flow paths between the inlet and the outlet.

A plasma source, comprising:

• a body including an inlet and an outlet;
• an RF coil surrounding the body;
• and
• a channel formed within the body and fluidly coupling the inlet and the outlet, wherein an inside surface of the channel is coated with yttrium oxide, diamond-like carbon, or aluminum oxide silicon magnesium yttrium.