Deposition apparatus and deposition method using the same
AssigneeSamsung Display Co., Ltd.
InventorJeongwon Han
Life of this patent
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Abstract
A deposition apparatus and a deposition method are disclosed. In one aspect, the deposition apparatus includes an electrostatic chuck and a tensile plate attached to and formed over the electrostatic chuck. The deposition apparatus further includes an elevation unit configured to move the tensile plate towards the substrate and a tensile unit configured to apply a tensile force to the tensile plate to expand the tensile plate.
Claims20
A deposition apparatus for depositing a deposition material onto a substrate, the deposition apparatus comprising:
- an electrostatic chuck;
- a tensile plate attached to and formed over the electrostatic chuck;
- an elevation unit configured to move the tensile plate towards the substrate;
- and
- a tensile unit configured to apply a tensile force to the tensile plate to expand the tensile plate.
A deposition method comprising:
- substantially aligning a mask with a substrate;
- driving an elevation unit to lower a tensile plate in a direction towards the substrate such that an electrostatic chuck approaches the substrate;
- applying a voltage to the electrostatic chuck to attach the substrate to the electrostatic chuck;
- applying a tensile force via a tensile unit to the tensile plate so as to expand the tensile plate;
- driving the elevation unit to lower the tensile plate such that the substrate adheres to the mask;
- and
- depositing a deposition material from a source part onto the substrate through the mask.
A deposition apparatus for depositing a deposition material onto a substrate, the deposition apparatus comprising:
- an electrostatic chuck having a curved shape;
- a tensile plate attached to and formed over the electrostatic chuck, wherein the tensile plate has a curved shape corresponding to that of the electrostatic chuck;
- and
- an elevation unit configured to move the tensile plate towards the substrate.
Dependencies are inferred from the claim text.