Magnetoresistive memory device and manufacturing method of the same
AssigneeKabushiki Kaisha Toshiba
InventorsMasaru TOKO, Kuniaki SUGIURA, Yutaka HASHIMOTO, Katsuya NISHIYAMA, Tadashi KAI
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AssigneeKabushiki Kaisha Toshiba
InventorsMasaru TOKO, Kuniaki SUGIURA, Yutaka HASHIMOTO, Katsuya NISHIYAMA, Tadashi KAI
Estimating the term…
According to one embodiment, a manufacturing method of a magnetoresistive memory device includes forming a first magnetic layer on a substrate, forming a magnetoresistive effect element on the first magnetic layer, forming a mask on a part of the magnetoresistive effect element, selectively etching the magnetoresistive effect element using the mask, forming a sidewall insulating film on a sidewall of the magnetoresistive effect element exposed by the etching, selectively etching the first magnetic layer using the mask and the sidewall insulating film and forming a deposition layer containing a magnetic material on a sidewall of the first magnetic layer and the sidewall insulating film, and introducing ions into the deposition layer.
A manufacturing method of a magnetoresistive memory device, comprising:
A manufacturing method of a magnetoresistive memory device, comprising:
A magnetoresistive memory device, comprising:
Dependencies are inferred from the claim text.